单项选择题
A.热丝化学气相沉积 B.光化学气相沉积 C.辉光放电分解气相沉积 D.溅射气相沉积
A.5% B.20% C.10% D.15%
A.SiH4加PH3 B.SiH4加BH3 C.PH3加BH3 D.SiH4加B2H6
A.104℃/s B.105℃/s C.103℃/s D.102℃/s
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